Influence de la molarité des films d'oxyde de zinc ZnO élaborés par spray pneumatique

Abstract

The aim of this study is to fabricate zinc oxide thin films on glass substrates using the pneumatic spray pyrolysis technique with the goal of optimizing the precursor concentration (〖ZnCl〗_2). We varied the molarity from 0.02 to 0.08 mol/L with a step of 0.02 mol/L, whiletheother parameters such as substrate temperature at 400 °C, pressure at 1 bar, nozzle-substrate distance at 30 cm, and deposition time at 3 minutesare fixed. To investigate the structural, morphological, optical, and electrical characteristics, we employed X-ray diffraction, stylus profilometer, UV-Vis spectrophotometry, ellipsometry, and Halleffect method. We found that the fabricated films are polycrystalline zinc oxide with a hexagonal wurtzite structure. The transparency of our films in the visible range is approximately 80 %.